Prof. Shacham-Diamand Yosi
|Affiliation:||Department Of Solid Mechanics, Materials And Systems, School of Electrical Engineering
|Postal Address:||Department of Solid Mechanics, Materials and Systems|
School of Electrical Engineering
Tel Aviv University
Tel Aviv 69978
Nano-chemical processes for Microelectronics and integration of biological material on chip for acute toxicity detection
Nano-chemistry for electronics applications- Physical and electrical characterization of electronic devices for CMOS technologies made by various chemical techniques such as self assembled monolayers and surface catalyzed auto catalytic electrochemical processes. The research involves studying of the basic chemistry and electrochemistry of those structures as well as the fabrication steps and the integration onto CMOS compatible structures that can be used for electronics and nano-bio interfacing applications.
Interconnects applications for ULSI – nano-scale Cu Damascene interconnect structures, Cu deposition on nano structures with high aspect ratio, barrier and capping layers, deposition on low-k (low dielectric constant) insulating materials. Electroless plating of Cu wires, Co and Nickel alloy barriers on low-dielectric constant materials. The group main research activities are on the following topics: Electrical properties of interconnect structures, materials properties – composition, texture, morphology, field effect transistors applications, electrical characterization, physical modeling, electrical modeling. The main applications that are being investigated today:
Image of the electrochemical silicon chip wire bonded to the PCB platform
(b) Electrochemical-cells on chip consist of three embedded electrodes: gold working lectrode (30nm2), gold counter electrode (300nm2), and Ag/AgCl reference electrodes.