Prof. Krylov Slava
|Affiliation:||School Of Mechanical Engineering, Faculty of Engineering
|Postal Address:||School of Mechanical Engineering|
Faculty of Engineering
Tel Aviv University
Tel Aviv 69978
Micro- and nanoelectromechanical systems (MEMS/NEMS), micro- and nano sensors and actuators
Microsystems or MEMS (Microelectromechanical Systems) are the batch-fabricated integrated microscale systems converting various physical (mechanical, optical, electromagnetic) and chemical stimuli to electrical signals and vice versa. Microsystems find application in various areas of engineering due to their low fabrication cost, low energy consumption and high or unique performance. To date, a large variety of micro systems based applications were reported and several MEMS based products were successfully commercialized. In light of the unabated progress in micro technologies and escalation in complexity and diversity of micro-devices, modeling issues that were ignored in the past have become of primary importance. The ability to predict possible failure mechanisms and performance of batch-fabricated devices at early stages of the design is among the most important requirements to modeling tools. The increasing device performance requirements of a highly competitive industry have resulted in the emergence of more sophisticated designs that exploit more complex physical effects.