Prof. Shacham-Diamand Yosi

Affiliation:Department Of Solid Mechanics, Materials And Systems, School of Electrical Engineering
Tel:  (972)-3-6408064
Fax: (972)-3-6423508
Personal Website:

Postal Address:Department of Solid Mechanics, Materials and Systems
School of Electrical Engineering

Tel Aviv University
Tel Aviv 69978

Research Interest

Nano-chemical processes for Microelectronics and integration of biological material on chip for acute toxicity detection

Nano-chemistry for electronics applications- Physical and electrical characterization of electronic devices for CMOS technologies made by various chemical techniques such as self assembled monolayers and surface catalyzed auto catalytic electrochemical processes.   The research involves studying of the basic chemistry and electrochemistry of those structures as well as the fabrication steps and the integration onto CMOS compatible structures that can be used for electronics and nano-bio interfacing applications.

Interconnects applications for ULSI   nano-scale Cu Damascene interconnect structures, Cu deposition on nano structures with high aspect ratio, barrier and capping layers, deposition on low-k (low dielectric constant) insulating materials.  Electroless plating of Cu wires, Co and Nickel alloy barriers on low-dielectric constant materials. The group main research activities are on the following topics: Electrical properties of interconnect structures, materials properties composition, texture, morphology, field effect transistors applications, electrical characterization, physical modeling, electrical modeling. The main applications that are being investigated today:

  1. Cell on chip applications integration of cells on bio-chips for functional sensing of molecular components in aqueous solutions. The cells are genetically engineered to generate a readily detectable electrical signal upon sensing toxicants; this signal will be detected by either nano-electrodes or the ion-sensitive field effect transistors, amplified, interpreted and broadcast by the electronic circuitry.Both nano-electrodes and the transistors will be made using self assembled techniques.
  2. Directed metallization of cells for integrated electrochemical nano-biochip  - electroless deposition in two levels: molecularlevel and cellular level and studying the impact of metal deposition of cells on integrated biochip. It will be followed by experimental section which includes enzyme/cell metallization and activity experiments, evaluation of the immobilization of the metallized cells and electrochemical measurement of the metallized cells.

Image of the electrochemical silicon chip wire bonded to the PCB platform

(a) Array of eight 100nL electrochemical cells on a silicon chip. The chip is glued to the tailored PCB platform, and the chip's gold pads are wire bonded to the gold PCB's electrodes. The PCB board enters directly to the socket of an external sensing circuit.

(b) Electrochemical-cells on chip consist of three embedded electrodes: gold working lectrode (30nm2), gold counter electrode (300nm2), and Ag/AgCl reference electrodes.

Selected Publications

  • Rachela Popovitzer, Tova Neufeld, Dvora Biran, Eliora Z. Ron, Judith Rishpon, and Yosi Shacham-Diamand " Novel Integrated Electrochemical Nano-Biochip for Toxicity Detection in Water", NANO LETTERS 2005 Vol. 5, No. 6 1023-1027.
  • M. Yoshino a, Y. Nonaka, J. Sasano, I. Matsuda, Y. Shacham-Diamand, T. Osaka , All-wet fabrication process for ULSI interconnect technologies, Electrochimica Acta 51 (2005) 916-920
  • A. Inberg, A. Ruzin, I. Torchinsky, V. Bogush, N. Croitoru *, Y. Shacham-Diamand, Annealing influence on electrical transport mechanism of electroless deposited very thin Ag(W) films, Thin Solid Films , in press (2005).
  • Hila Einati, Vadim Bogush, Yelena Sverdlov, Yuri Rosenberg, Yosi Shacham-Diamand, The effect of tungsten and boron on the Cu barrier and oxidation properties of thin electroless cobalt-tungsten-boron films, Microelectronic Engineering , in press (2005).
  • E. Glickman a, A. Inberg , V. Bogush , G. Aviram , R. Popovitz , N. Croitoru , Y. Shacham-Diamand, "Role of local microchemistry and surface structure in electrical resistivity of 50 nm electroless films Ag-W-oxygen", Microelectronic Engineering, in press (2005).