Prof. Krylov Slava

Affiliation:School Of Mechanical Engineering, Faculty of Engineering
Wolfson building
room 332
Tel:  (972)-3-6405930
Fax: (972)-3-6407617
Personal Website:

Postal Address:School of Mechanical Engineering
Faculty of Engineering

Tel Aviv University
Tel Aviv 69978

Research Interest

Micro- and nanoelectromechanical systems (MEMS/NEMS), micro- and nano sensors and actuators

Microsystems or MEMS (Microelectromechanical Systems) are the batch-fabricated integrated microscale systems converting various physical (mechanical, optical, electromagnetic) and chemical stimuli to electrical signals and vice versa. Microsystems find application in various areas of engineering due to their low fabrication cost, low energy consumption and high or unique performance.  To date, a large variety of micro systems based applications were reported and several MEMS based products were successfully commercialized. In light of the unabated progress in micro technologies and escalation in complexity and diversity of micro-devices, modeling issues that were ignored in the past have become of primary importance.  The ability to predict possible failure mechanisms and performance of batch-fabricated devices at early stages of the design is among the most important requirements to modeling tools.  The increasing device performance requirements of a highly competitive industry have resulted in the emergence of more sophisticated designs that exploit more complex physical effects.
In our research we  develop new actuation and sensing approaches and their implementation in micro devices along with investigation of complex nonlinear electromechanical phenomena which are intrinsic in microstructures but are not encountered naturally in conventional large-scale structures.  A better understanding of physical phenomena gained during extensive theoretical and experimental investigation carried out in the laboratory serves as a basis for generating new designs and operational concepts of micro devices.

Selected Publications

  • S. Krylov and N. Dick, “Dynamic Stability of Electrostatically Actuated Initially Curved Shallow Micro Beams,” Continuum Mechanics and Thermodynamics, 22(6), pp. 445-468, 2010.
  • S. Krylov, N. Dick, “Pull-In Dynamics of Electrostatically Actuated Bistable Micro Beams,” in Advanced Materials and Technologies for Micro/Nano-devices, Sensors and Actuators, NATO Science for Peace and Security Series - B: Physics and Biophysics, Edited by E. Gusev, E. Garfunkel, A. Dideikin,. Springer 2010, pp. 117-128.
  • Y. Gerson, S. Krylov and B. Ilic, “Electrothermal Bistability Tuning in a Large Displacement Micro Actuator,” Journal of Micromechanics and Microengineering, 20, paper 112001, 2010.
  • S. Krylov, Y. Gerson, T. Nachmias, U. Keren, “Excitation of Large Amplitude Parametric Resonance by the Mechanical Stiffness Modulation of a Microstructure,” Journal of Micromechanics and Microengineering, 20, 015041 (12pp), 2010.
  • A. Ya'akobovitz, S. Krylov, “Toward Sensitivity Enhancement of MEMS Accelerometers Using Mechanical Amplification Mechanism,” IEEE Sensors Journal, 10(8), pp. 1311-1319, 2010.
  • A. Ya'akobovitz, S. Krylov, Y. Hanein, “Nanoscale Displacement Measurement of Electrostatically Actuated Micro- Devices using Optical Microscopy and Digital Image Correlation,” Sensors and Actuators A-Physical, 162, pp.1-7, 2010.
  • Y. Linzon, S. Krylov, B. Ilic, D. Southworth, R. Barton, B. Cipriany, J. Cross, J. Parpia, H. Craighead, “Real-Time Synchronous Imaging of Electromechanical Resonator Mode and Equilibrium Profiles,” Optics Letters, 35(15), 2010
  • B. Ilic, S. Krylov, and H. G. Craighead, “Young’s Modulus and Density Measurements of Thin Atomic Layer Deposited Films using Resonant Nanomechanics,” Journal of Applied Physics, 108, paper 044317, 2010.